Xia, Feng <br/><br/>
Numerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing.  [electronic resource] 

 -  Optics express  Jul 2014 
 - 16889-96 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1094-4087 
<br/><br/><label>Standard No.: </label>10.1364/OE.22.016889  doi