Naz, M Y Development of simple designs of multitip probe diagnostic systems for RF plasma characterization. [electronic resource] - TheScientificWorldJournal 2014 - 279868 p. digital Publication Type: Journal Article ISSN: 1537-744X Standard No.: 10.1155/2014/279868 doi Subjects--Topical Terms: Computer-Aided DesignConductometry--instrumentationElectrodesEquipment DesignEquipment Failure AnalysisPlasma Gases--analysisRadio WavesTransducers