Riazanova, A V <br/><br/>
Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator.  [electronic resource] 

 -  Nanotechnology  Apr 2014 
 - 155301 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S. 
<br/><br/><label>ISSN: </label>1361-6528 
<br/><br/><label>Standard No.: </label>10.1088/0957-4484/25/15/155301  doi