TY  - GEN
AU  - Lam,Peter G
AU  - Haridasan,Vrinda
AU  - Feng,Zhiping
AU  - Steer,Michael B
AU  - Kingon,Angus I
AU  - Maria,Jon-Paul
TI  - Scaling issues in ferroelectric barium strontium titanate tunable planar capacitors
SN  - 1525-8955
PY  - 2015///0414
N1  - Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S
UR  - https://doi.org/10.1109/TUFFC.2012.2179
ER  -