TY  - GEN
AU  - Sun,Yiting
AU  - Krishtab,Mikhail
AU  - Struyf,Herbert
AU  - Verdonck,Patrick
AU  - De Feyter,Steven
AU  - Baklanov,Mikhail R
AU  - Armini,Silvia
TI  - Impact of plasma pretreatment and pore size on the sealing of ultra-low-k dielectrics by self-assembled monolayers
SN  - 1520-5827
PY  - 2015///0413
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1021/la404165n
ER  -