Sun, Yiting <br/><br/>
Impact of plasma pretreatment and pore size on the sealing of ultra-low-k dielectrics by self-assembled monolayers.  [electronic resource] 

 -  Langmuir : the ACS journal of surfaces and colloids  Apr 2014 
 - 3832-44 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1520-5827 
<br/><br/><label>Standard No.: </label>10.1021/la404165n  doi