TY  - GEN
AU  - Zschornack,G
AU  - König,J
AU  - Schmidt,M
AU  - Thorn,A
TI  - A compact, versatile low-energy electron beam ion source
SN  - 1089-7623
PY  - 2014///1030
KW  - Electrons
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1063/1.4826687
ER  -