TY  - GEN
AU  - Sudhir,Dass
AU  - Bandyopadhyay,M
AU  - Kraus,W
AU  - Gahlaut,A
AU  - Bansal,G
AU  - Chakraborty,A
TI  - Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation--an alternate approach
SN  - 1089-7623
PY  - 2014///1010
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1063/1.4863098
ER  -