Sudhir, Dass <br/><br/>
Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation--an alternate approach.  [electronic resource] 

 -  The Review of scientific instruments  Jan 2014 
 - 013510 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1089-7623 
<br/><br/><label>Standard No.: </label>10.1063/1.4863098  doi