Lazar, Josef <br/><br/>
Short-range six-axis interferometer controlled positioning for scanning probe microscopy.  [electronic resource] 

 -  Sensors (Basel, Switzerland)  Jan 2014 
 - 877-86 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1424-8220 
<br/><br/><label>Standard No.: </label>10.3390/s140100877  doi