TY  - GEN
AU  - Roberts,F Sloan
AU  - Anderson,Scott L
TI  - Note: Hollow cathode lamp with integral, high optical efficiency isolation valve: a modular vacuum ultraviolet source
SN  - 1089-7623
PY  - 2014///0825
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1063/1.4838675
ER  -