TY - GEN AU - Shepard,Michele Noble AU - Brenner,Sara TI - An occupational exposure assessment for engineered nanoparticles used in semiconductor fabrication SN - 1475-3162 PY - 2015///0810 KW - Aerosols KW - analysis KW - Air Pollutants, Occupational KW - Aluminum Oxide KW - Diatomaceous Earth KW - Environmental Monitoring KW - methods KW - Filtration KW - instrumentation KW - Humans KW - Inhalation Exposure KW - Microscopy, Electron, Transmission KW - Nanoparticles KW - Occupational Exposure KW - Semiconductors KW - Spectrometry, X-Ray Emission KW - Workplace N1 - Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S UR - https://doi.org/10.1093/annhyg/met064 ER -