TY  - GEN
AU  - Gebhard,M
AU  - Hellwig,M
AU  - Parala,H
AU  - Xu,K
AU  - Winter,M
AU  - Devi,A
TI  - Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In2O3 thin films
SN  - 1477-9234
PY  - 2014///0729
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1039/c3dt52746h
ER  -