Gebhard, M <br/><br/>
Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In2O3 thin films.  [electronic resource] 

 -  Dalton transactions (Cambridge, England : 2003)  Jan 2014 
 - 937-40 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1477-9234 
<br/><br/><label>Standard No.: </label>10.1039/c3dt52746h  doi