TY  - GEN
AU  - Accoto,D
AU  - Schena,E
AU  - Cidda,M
AU  - Francomano,M
AU  - Saccomandi,P
AU  - Silvestri,S
TI  - A micro opto-mechanical displacement sensor based on micro-diffraction gratings: design and characterization
SN  - 2694-0604
PY  - 2015///0820
KW  - Equipment Design
KW  - Fiber Optic Technology
KW  - Glass
KW  - chemistry
KW  - Light
KW  - Microtechnology
KW  - Platinum
KW  - Transducers
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1109/EMBC.2013.6610600
ER  -