TY  - GEN
AU  - Kurhekar,Anil Sudhakar
AU  - Apte,P R
TI  - Step-Height Measurement of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry
SN  - 2231-1963
PY  - 2012///
PB  - International journal of advances in engineering and technology
N1  - Publication Type: Journal Article
ER  -