Kurhekar, Anil Sudhakar <br/><br/>
Step-Height Measurement of Surface Functionalized Micromachined Microcantilever Using Scanning White Light Interferometry.  [electronic resource] 

 -  International journal of advances in engineering and technology  Jan 2012 
 - 241-248 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>2231-1963