TY  - GEN
AU  - Meskers,Arjan J H
AU  - Voigt,Dirk
AU  - Spronck,Jo W
TI  - Relative optical wavefront measurement in displacement measuring interferometer systems with sub-nm precision
SN  - 1094-4087
PY  - 2014///0407
KW  - Computer-Aided Design
KW  - Equipment Design
KW  - Equipment Failure Analysis
KW  - Fiber Optic Technology
KW  - instrumentation
KW  - Imaging, Three-Dimensional
KW  - Interferometry
KW  - Lenses
KW  - Nanotechnology
KW  - Refractometry
KW  - Surface Plasmon Resonance
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1364/OE.21.017920
ER  -