Meskers, Arjan J H <br/><br/>
Relative optical wavefront measurement in displacement measuring interferometer systems with sub-nm precision.  [electronic resource] 

 -  Optics express  Jul 2013 
 - 17920-30 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1094-4087 
<br/><br/><label>Standard No.: </label>10.1364/OE.21.017920  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Computer-Aided Design<br/>Equipment Design<br/>Equipment Failure Analysis<br/>Fiber Optic Technology--instrumentation<br/>Imaging, Three-Dimensional--instrumentation<br/>Interferometry--instrumentation<br/>Lenses<br/>Nanotechnology--instrumentation<br/>Refractometry--instrumentation<br/>Surface Plasmon Resonance--instrumentation