Kang, Dong Won <br/><br/>
Accurate position measurement of a high-density beam spot array in digital maskless lithography.  [electronic resource] 

 -  Applied optics  Aug 2013 
 - 5862-8 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1539-4522 
<br/><br/><label>Standard No.: </label>10.1364/AO.52.005862  doi