Lee, Sunwoo
Graphene metallization of high-stress silicon nitride resonators for electrical integration. [electronic resource]
- Nano letters Sep 2013
- 4275-9 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S.
1530-6992
10.1021/nl4020414 doi
Equipment Design
Graphite--chemistry
Metals--chemistry
Micro-Electrical-Mechanical Systems
Nanostructures--chemistry
Silicon Compounds--chemistry