Lee, Sunwoo

Graphene metallization of high-stress silicon nitride resonators for electrical integration. [electronic resource] - Nano letters Sep 2013 - 4275-9 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S.

1530-6992

10.1021/nl4020414 doi


Equipment Design
Graphite--chemistry
Metals--chemistry
Micro-Electrical-Mechanical Systems
Nanostructures--chemistry
Silicon Compounds--chemistry