Soylemez, E <br/><br/>
Probing microelectromechanical systems in an environmentally controlled chamber using long working distance interferometry.  [electronic resource] 

 -  The Review of scientific instruments  Jul 2013 
 - 075006 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1089-7623 
<br/><br/><label>Standard No.: </label>10.1063/1.4816017  doi