TY  - GEN
AU  - Lin,Peng
AU  - Pi,Shuang
AU  - Jiang,Hao
AU  - Xia,Qiangfei
TI  - Mold cleaning with polydimethylsiloxane for nanoimprint lithography
SN  - 1361-6528
PY  - 2014///0505
N1  - Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S
UR  - https://doi.org/10.1088/0957-4484/24/32/325301
ER  -