Lin, Peng <br/><br/>
Mold cleaning with polydimethylsiloxane for nanoimprint lithography.  [electronic resource] 

 -  Nanotechnology  Aug 2013 
 - 325301 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S. 
<br/><br/><label>ISSN: </label>1361-6528 
<br/><br/><label>Standard No.: </label>10.1088/0957-4484/24/32/325301  doi