TY  - GEN
AU  - Joo,Woo-Deok
AU  - Kim,Seungman
AU  - Park,Jiyong
AU  - Lee,Keunwoo
AU  - Lee,Joohyung
AU  - Kim,Seungchul
AU  - Kim,Young-Jin
AU  - Kim,Seung-Woo
TI  - Femtosecond laser pulses for fast 3-D surface profilometry of microelectronic step-structures
SN  - 1094-4087
PY  - 2014///0226
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1364/OE.21.015323
ER  -