Joo, Woo-Deok <br/><br/>
Femtosecond laser pulses for fast 3-D surface profilometry of microelectronic step-structures.  [electronic resource] 

 -  Optics express  Jul 2013 
 - 15323-34 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1094-4087 
<br/><br/><label>Standard No.: </label>10.1364/OE.21.015323  doi