Korsunska, Nadiia Si-rich Al2O3 films grown by RF magnetron sputtering: structural and photoluminescence properties versus annealing treatment. [electronic resource] - Nanoscale research letters Jun 2013 - 273 p. digital Publication Type: Journal Article ISSN: 1931-7573 Standard No.: 10.1186/1556-276X-8-273 doi