TY  - GEN
AU  - Polley,Craig M
AU  - Clarke,Warrick R
AU  - Miwa,Jill A
AU  - Scappucci,Giordano
AU  - Wells,Justin W
AU  - Jaeger,David L
AU  - Bischof,Maia R
AU  - Reidy,Richard F
AU  - Gorman,Brian P
AU  - Simmons,Michelle
TI  - Exploring the limits of N-type ultra-shallow junction formation
SN  - 1936-086X
PY  - 2013///1023
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S
UR  - https://doi.org/10.1021/nn4016407
ER  -