Polley, Craig M <br/><br/>
Exploring the limits of N-type ultra-shallow junction formation.  [electronic resource] 

 -  ACS nano  Jun 2013 
 - 5499-505 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S. 
<br/><br/><label>ISSN: </label>1936-086X 
<br/><br/><label>Standard No.: </label>10.1021/nn4016407  doi