TY  - GEN
AU  - Kolasinski,Kurt W
AU  - Barclay,William B
TI  - The stoichiometry of electroless silicon etching in solutions of V2O5 and HF
SN  - 1521-3773
PY  - 2014///0107
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1002/anie.201300755
ER  -