TY  - GEN
AU  - Belt,Michael
AU  - Bovington,Jock
AU  - Moreira,Renan
AU  - Bauters,Jared F
AU  - Heck,Martijn J R
AU  - Barton,Jonathon S
AU  - Bowers,John E
AU  - Blumenthal,Daniel J
TI  - Sidewall gratings in ultra-low-loss Si3N4 planar waveguides
SN  - 1094-4087
PY  - 2013///0904
N1  - Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S
UR  - https://doi.org/10.1364/OE.21.001181
ER  -