TY  - GEN
AU  - Sood,Anjali
AU  - Sundberg,Pia
AU  - Karppinen,Maarit
TI  - ALD/MLD of novel layer-engineered Zn-based inorganic-organic hybrid thin films using heterobifunctional 4-aminophenol as an organic precursor
SN  - 1477-9234
PY  - 2013///0912
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1039/c2dt32630b
ER  -