TY  - GEN
AU  - Zhu,Shiyang
AU  - Lo,G Q
AU  - Li,Weihong
AU  - Kwong,D L
TI  - Effect of cladding layer and subsequent heat treatment on hydrogenated amorphous silicon waveguides
SN  - 1094-4087
PY  - 2013///0530
KW  - Equipment Design
KW  - Equipment Failure Analysis
KW  - Hot Temperature
KW  - Hydrogen
KW  - chemistry
KW  - Materials Testing
KW  - Refractometry
KW  - instrumentation
KW  - Silicon Dioxide
KW  - Surface Plasmon Resonance
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1364/OE.20.023676
ER  -