Effect of cladding layer and subsequent heat treatment on hydrogenated amorphous silicon waveguides. [electronic resource]
- Optics express Oct 2012
- 23676-83 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1094-4087
10.1364/OE.20.023676 doi
Equipment Design Equipment Failure Analysis Hot Temperature Hydrogen--chemistry Materials Testing Refractometry--instrumentation Silicon Dioxide--chemistry Surface Plasmon Resonance--instrumentation