TY - GEN AU - Zamkotsian,F AU - Timotijevic,B AU - Lockhart,R AU - Stanley,R P AU - Lanzoni,P AU - Luetzelschwab,M AU - Canonica,M AU - Noell,W AU - Tormen,M TI - Optical characterization of fully programmable MEMS diffraction gratings SN - 1094-4087 PY - 2013///0528 N1 - Publication Type: Journal Article; Research Support, Non-U.S. Gov't UR - https://doi.org/10.1364/OE.20.025267 ER -