TY - GEN AU - Sulyok,A AU - Toth,A L AU - Zommer,L AU - Menyhard,M AU - Jablonski,A TI - Simulation of the backscattered electron intensity of multi layer structure for the explanation of secondary electron contrast SN - 1879-2723 PY - 2013///0815 KW - Computer Simulation KW - Electrons KW - Microscopy, Electron, Scanning KW - methods KW - Monte Carlo Method N1 - Publication Type: Journal Article; Research Support, Non-U.S. Gov't UR - https://doi.org/10.1016/j.ultramic.2012.08.004 ER -