TY  - GEN
AU  - Liu,Zhuang
AU  - Zhang,Ying
AU  - Kok,Shaw Wei
AU  - Ng,Boon Ping
AU  - Soh,Yeng Chai
TI  - Reflection-based near-field ellipsometry for thin film characterization
SN  - 1879-2723
PY  - 2013///0815
KW  - Nanostructures
KW  - ultrastructure
KW  - Spectroscopy, Near-Infrared
KW  - methods
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1016/j.ultramic.2012.08.003
ER  -