TY  - GEN
AU  - Kim,Hong Jin
AU  - Yang,Ji Chul
AU  - Yoon,Bo Un
AU  - Lee,Hyeon-Deok
AU  - Kim,Taesung
TI  - Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process
SN  - 1533-4880
PY  - 2012///0927
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1166/jnn.2012.6389
ER  -