Kim, Hong Jin <br/><br/>
Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process.  [electronic resource] 

 -  Journal of nanoscience and nanotechnology  Jul 2012 
 - 5683-6 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1533-4880 
<br/><br/><label>Standard No.: </label>10.1166/jnn.2012.6389  doi