TY  - GEN
AU  - Shin,Ju-Hyeon
AU  - Yang,Ki-Yeon
AU  - Han,Kang-Soo
AU  - Kim,Hyeong-Seok
AU  - Lee,Heon
TI  - Sub 50 nm nano-patterns with carbon based spin-on organic hardmask
SN  - 1533-4880
PY  - 2012///0813
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1166/jnn.2012.5646
ER  -