Shin, Ju-Hyeon <br/><br/>
Sub 50 nm nano-patterns with carbon based spin-on organic hardmask.  [electronic resource] 

 -  Journal of nanoscience and nanotechnology  Apr 2012 
 - 3364-8 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1533-4880 
<br/><br/><label>Standard No.: </label>10.1166/jnn.2012.5646  doi