TY  - GEN
AU  - Defforge,Thomas
AU  - Billoué,Jérôme
AU  - Diatta,Marianne
AU  - Tran-Van,François
AU  - Gautier,Gaël
TI  - Copper-selective electrochemical filling of macropore arrays for through-silicon via applications
SN  - 1556-276X
PY  - 2012///1002
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1186/1556-276X-7-375
ER  -