Martinez-Rivas, A Wafer scale interdigitated nanoelectrode devices functionalized using a MEMS-based deposition system. [electronic resource] - Nanotechnology Mar 2012 - 105302 p. digital Publication Type: Journal Article ISSN: 1361-6528 Standard No.: 10.1088/0957-4484/23/10/105302 doi Subjects--Topical Terms: Biosensing Techniques--instrumentationEquipment DesignMicro-Electrical-Mechanical Systems--instrumentationMicroelectrodesNanotechnology--instrumentationPolymethyl Methacrylate