TY  - GEN
AU  - Park,Soon-Yeol
AU  - Sung,Kun-Sik
AU  - Won,Taeyoung
TI  - Kinetic Monte Carlo study on the suppression of boron transient enhanced diffusion with carbon pre-implant
SN  - 1533-4880
PY  - 2012///0105
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1166/jnn.2011.4463
ER  -