Park, Soon-Yeol <br/><br/>
Kinetic Monte Carlo study on the suppression of boron transient enhanced diffusion with carbon pre-implant.  [electronic resource] 

 -  Journal of nanoscience and nanotechnology  Jul 2011 
 - 6594-8 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1533-4880 
<br/><br/><label>Standard No.: </label>10.1166/jnn.2011.4463  doi