TY  - GEN
AU  - Murota,Junichi
AU  - Sakuraba,Masao
AU  - Tillack,Bernd
TI  - Atomically controlled processing in silicon-based CVD epitaxial growth
SN  - 1533-4880
PY  - 2011///1206
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1166/jnn.2011.5052
ER  -