TY - GEN AU - Gasseller,M AU - DeNinno,M AU - Loo,R AU - Harrison,J F AU - Caymax,M AU - Rogge,S AU - Tessmer,S H TI - Single-electron capacitance spectroscopy of individual dopants in silicon SN - 1530-6992 PY - 2012///0413 N1 - Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S UR - https://doi.org/10.1021/nl2025163 ER -