TY  - GEN
AU  - Unterumsberger,Rainer
AU  - Pollakowski,Beatrix
AU  - Müller,Matthias
AU  - Beckhoff,Burkhard
TI  - Complementary characterization of buried nanolayers by quantitative X-ray fluorescence spectrometry under conventional and grazing incidence conditions
SN  - 1520-6882
PY  - 2012///0330
KW  - Boron
KW  - chemistry
KW  - Carbon
KW  - Nanostructures
KW  - Spectrometry, X-Ray Emission
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1021/ac202074s
ER  -