TY  - GEN
AU  - Valdrè,Giovanni
AU  - Moro,Daniele
TI  - 3D finite element analysis of electrostatic deflection of commercial and FIB-modified cantilevers for electric and Kelvin force microscopy: I. Triangular shaped cantilevers with symmetric pyramidal tips
SN  - 0957-4484
PY  - 2012///1002
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1088/0957-4484/19/40/405501
ER  -