Valdrč, Giovanni

3D finite element analysis of electrostatic deflection of commercial and FIB-modified cantilevers for electric and Kelvin force microscopy: I. Triangular shaped cantilevers with symmetric pyramidal tips. [electronic resource] - Nanotechnology Oct 2008 - 405501 p. digital

Publication Type: Journal Article

0957-4484

10.1088/0957-4484/19/40/405501 doi